CMP檢測AFM 雷光干涉 跟? - 工程師

By Iris
at 2022-12-21T10:18
at 2022-12-21T10:18
Table of Contents
如題,這次是製程面試的工程師來了,他問我說CMP後的晶片我們還是要表面觀察,我回
答AFM 、白光干涉,工程師點了頭說 好 力學跟光學 但你漏了一項,我又無言了,版上
有人知道嗎?(不是TEM 、SEM也不是SIMS…)
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答AFM 、白光干涉,工程師點了頭說 好 力學跟光學 但你漏了一項,我又無言了,版上
有人知道嗎?(不是TEM 、SEM也不是SIMS…)
--
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