半導體四大Module操度? - 工程師
By James
at 2016-07-30T13:55
at 2016-07-30T13:55
Table of Contents
各位大大好，
常常聽到有人說fab端四大module就是超級屎缺，
怎麼比也就是挑個沒那麼臭的來吃，
以EE來說常見的排名好像是 etch = litho > diffusion = thin film...
很少看到以PE的的角度來看，同為難兄難弟，排名也是差不多嗎?
如果再細分module內如CVD、PVD、CMP等等，
有沒有個屎度power rank可以排阿，顆顆。
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