各module的操度 - 工程師
By Ida
at 2021-01-22T21:02
at 2021-01-22T21:02
Table of Contents
有人調查過每個module的操度嗎
愚以為是
蝕刻>黃光>CMP>Wet>>Diffusion>EPI=CVD>PVD>Imp>RTP>>>metrology
不服來辯
--
愚以為是
蝕刻>黃光>CMP>Wet>>Diffusion>EPI=CVD>PVD>Imp>RTP>>>metrology
不服來辯
--
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工程師
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