川寶、志聖 攻3D IC曝光機 - 工程師
By Agnes
at 2015-04-01T19:12
at 2015-04-01T19:12
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川寶、志聖 攻3D IC曝光機
2015-04-01 03:49:46經濟日報 記者李珣瑛/新竹報導
為協助台灣設備廠搶進3D IC曝光機市場,國研院儀科中心昨(31)日發表全台第一套在
地化、自主設計製造的步進式曝光機投影鏡頭,預計今年底可以完成曝光機光源模組開發
,設備廠川寶(1595)、志聖、東捷及旭東等,都有意投入生產。
儀科中心昨天舉辦「半導體製程設備關鍵元組件展示暨招商說明會」,發表相關研發成果
,期望累積的技術能量與半導體設備產業串聯,帶動上下游關鍵零組件在地化發展。
http://udn.com/news/story/7254/808388-川寶、志聖-攻3D-IC曝光機
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