日本一直把持光阻劑市場? - 工程師
By Damian
at 2022-12-07T12:05
at 2022-12-07T12:05
Table of Contents
光阻Photoresist就是照光會反應的材料,沒什麼困難的概念
在半導體上從低階到高階都會有,現在日本市佔大的就高階的光阻
大概佔90%以上,都是信越 JSR TOK 富士軟片跟住友占走
最高階的EUV光阻,信越跟JSR跑在前面。
日本的有機合成經驗多,且材料純度高,做食品或味素的公司做電子
材料也可以賣很好。然後早起就進入光反應樹脂的市場,累積大量開發
與合成經驗當然越走越遠,專利也越寫越多
不過現在光阻的基礎骨幹結構與配方都寫在Paper上,也不是甚麼新東西
材料現在有用MI在模擬,配方與結構遲早被摸出來。
剩下只有繞過專利惹,如果不理專利的話應該難度不會太高。
但是當然會不會只有配方這麼簡單,每個layer的特性都要做調整
差幾奈米的pattern效能天差地遠。
除了配方以外,量產與純化標準都高到不行,雜質含量也是0後面好幾個0的程度
量產製造的與純化要達到這個要求,know how也是很多,連環境也要高等的無塵室才行。
這些也是提早進入市場所累積出來的經驗,現在EUV的技術與貨物出口都要經過日本政府
審查同意,連開發人員都要身家調查才給摸,拿來當貿易武器的東西真的不一樣。
最後,最重要的是,要有FAB給你測,晶片製造商很難讓一個沒有經驗與信賴性的
原料供應商測光阻,不知道品質與量產能力,還沒有實績;如現在EUV的測試因為材料
供應商沒有EUV的tool,只能給有tool的客戶或是實驗室測,整個拉長了開發時間;如果
有新來的供應商應該沒甚麼空間能夠生存。
所以自然就只剩下這些供應商存在了。
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