有哪些低調的設備商? - 工程師

By Ursula
at 2022-06-11T13:29
at 2022-06-11T13:29
Table of Contents
撇除五大設備商 ASML APPLIED TEL Lam KLA
還有哪些規模沒這麼大 但技術跟機台在某個製程或領域很獨佔的vendor?
像是DNS 洗淨clean一哥
NOVA 以色列量測vendor
ASM 前ASML母公司 EPI, CVD, ALD為主力機台
IMS e-beam writer 製作光罩的vendor
Kokusai Electric 好像爐管很多都這家的? 之前被APPLIED併購沒成?
Mattson RTP, strip, etch都有
Hitachi 日立先端 記得有dry etch 還有CD SEM, defect檢測機台
Lasertec 光罩檢測vendor
PSK 好像是strip, dry clean為主
ULVAC 只知道有PVD機台
EBARA 只知道有CMP機台
還有哪些比較低調的設備商呢?
--
還有哪些規模沒這麼大 但技術跟機台在某個製程或領域很獨佔的vendor?
像是DNS 洗淨clean一哥
NOVA 以色列量測vendor
ASM 前ASML母公司 EPI, CVD, ALD為主力機台
IMS e-beam writer 製作光罩的vendor
Kokusai Electric 好像爐管很多都這家的? 之前被APPLIED併購沒成?
Mattson RTP, strip, etch都有
Hitachi 日立先端 記得有dry etch 還有CD SEM, defect檢測機台
Lasertec 光罩檢測vendor
PSK 好像是strip, dry clean為主
ULVAC 只知道有PVD機台
EBARA 只知道有CMP機台
還有哪些比較低調的設備商呢?
--
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