有關CMP的機台~ - 工程師

By Jessica
at 2018-03-16T14:05
at 2018-03-16T14:05
Table of Contents
請問為何CMP的機台都在Fab角落或是邊邊角角的地方?
有些Fab甚至連CMP的區域都有獨立隔間,
幾乎沒見過像是T/F,Etch那種散落在Fab各區的~
--
有些Fab甚至連CMP的區域都有獨立隔間,
幾乎沒見過像是T/F,Etch那種散落在Fab各區的~
--
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