關於半導體類的sputter製程靶材 - 工程師

By Tom
at 2015-01-03T22:13
at 2015-01-03T22:13
Table of Contents
不曉得在這個板是否有人知道,在半導體製程中PVD製程裡的靶材要去哪家公司
購買呢? (ex : Au ,Ag ,In, Sn, Pt , ITO ,或是一些混合比例的靶材,如GaAs)
因為所需的量不大,只是小實驗室等級需求,所以還請
友知道這方面訊息朋友分享,謝謝。
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