反制裁,俄羅斯砸2億宣布研發光刻機 - 工程師
By Anthony
at 2022-04-04T19:05
at 2022-04-04T19:05
Table of Contents
俄羅斯 31 日宣佈向莫斯科電子技術學院 (MIET) 撥款 67 億盧佈、約 6,100 萬港幣(
約2億台幣),研發全新 X 射線光刻機,技術相較 ASML 公司的 EUV 光刻機更先進,有
望打破西方國家技術制裁並終止 ASML 公司的壟斷地位。
有別於傳統的EVU 極紫外線光刻機,X 射線光刻技術採用同步加速度配合等離子體源的無
遮罩光刻技術,由於 X 射線波長介乎10nm 至 0.01nm 相較 EUV 更短,理論上能提供更
高的光刻分辨率,能提供更先進的制程工藝。
X 射線光刻機另一個優勢是直寫光刻,無需要用光掩遮罩,因此成本也能大大降低,俄羅
斯媒體更宣傳此舉將打破西方在晶片技術上的制裁,同時能打破 ASML 公司多年來的壟斷
。
其實,美國、中國及、歐洲多國均曾經研究 X 射線光刻技術的可能性,但最終放棄收場
。
https://i.imgur.com/4Qg6BwH.jpg
文章來源
https://www.facebook.com/94338753945/posts/10158710455023946/?d=n
--
約2億台幣),研發全新 X 射線光刻機,技術相較 ASML 公司的 EUV 光刻機更先進,有
望打破西方國家技術制裁並終止 ASML 公司的壟斷地位。
有別於傳統的EVU 極紫外線光刻機,X 射線光刻技術採用同步加速度配合等離子體源的無
遮罩光刻技術,由於 X 射線波長介乎10nm 至 0.01nm 相較 EUV 更短,理論上能提供更
高的光刻分辨率,能提供更先進的制程工藝。
X 射線光刻機另一個優勢是直寫光刻,無需要用光掩遮罩,因此成本也能大大降低,俄羅
斯媒體更宣傳此舉將打破西方在晶片技術上的制裁,同時能打破 ASML 公司多年來的壟斷
。
其實,美國、中國及、歐洲多國均曾經研究 X 射線光刻技術的可能性,但最終放棄收場
。
https://i.imgur.com/4Qg6BwH.jpg
文章來源
https://www.facebook.com/94338753945/posts/10158710455023946/?d=n
--
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工程師
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