台積電宣告進入EUV新時代 - 工程師

Carol avatar
By Carol
at 2019-02-25T13:26

Table of Contents

半導體微影技術(lithography)終於迎來全新世代交替,過去10年主導半導體關鍵製程
的浸潤式(immersion)微影技術,將在今年開始轉向新一代的極紫外光(EUV)。晶圓
代工龍頭台積電將在3月開始啟動支援EUV技術的7+奈米量產計畫,支援EUV的5奈米亦將
同步進入試產。

台積電EUV製程進入量產階段,對半導體產業而言是一項重大里程碑,EUV技術可以讓摩
爾定律持續走下去,理論上將可推進半導體製程至1奈米。

雖然台積電第一代支援EUV技術的7+奈米,只有少數幾層光罩層會利用EUV完成,但包括
海思、輝達(NVIDIA)、超微(AMD)、博通、高通等都將陸續導入7+奈米製程量產。

不過根據業界消息,蘋果今年下半年推出的新一代A13應用處理器,並不會採用台積電支
援EUV技術的7+奈米,而是會採用加強版7奈米(7nm Pro)製程量產。業界預期,蘋果正
在研發中的A14應用處理器才會是首款採用EUV的晶片,預期明年採用台積電5奈米製程量
產。

為了加快EUV製程學習曲線,台積電支援EUV的7+奈米量產之際,預期有一半光罩層會採
用EUV技術的5奈米,亦將同步進入風險試產階段。台積電與大同盟(Grand Alliance)
夥伴密切合作打造EUV生態系統,包括業界傳出台積電已對EUV設備大廠艾司摩爾(ASML
)擴大採購30台設備,晶圓傳載方案廠家登亦成為最主要的EUV光罩盒供應商。

台積電總裁暨執行長魏哲家在日前法人說明會中指出,7+奈米良率推進情況良好,預期
第二季後進入量產階段,台積電已經與數家客戶合作,協助其第二代或第三代產品設計
導入7+奈米製程。台積電預期價格更好的7+奈米量產後,將可在未來幾年為7奈米世代帶
來更大的成長空間。至於5奈米目前研發進度符合預期,今年上半年會有客戶完成晶片設
計定案(tape-out),明年上半年將進入量產階段。

台積電7+奈米雖然只有部份光罩層採用EUV技術,但仍可提升電晶體密度約20%,並在同
一運作效能下降低功耗約10%。至於5奈米採用EUV光罩層更多,與7奈米相較預期可提升
電晶體密度達1.8倍或縮小晶片尺寸約45%,同一功耗下提升運算效能15%,或同一運算
效能下降低功耗20%。台積電亦計畫在5奈米世代加入極低臨界電壓(Extremely Low T
hreshold Voltage,ELTV)技術,協助客戶將運算效能提升至25%。


https://www.chinatimes.com/amp/newspapers/20190225000157-260202

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