面試被問後段製程為什麼半導體蓋那麼高 - 面試

By Charlie
at 2022-12-14T19:09
at 2022-12-14T19:09
Table of Contents
※ 引述《mytaiwan (轉角遇到困難)》之銘言:
: 如題,面試某科技廠時被問CMP和BEOL這些方向,結果人資問BEOL為什麼要蓋那麼高(
示
: 意圖)我說訊號傳遞,人資說能不能再清楚一點,然後我也不知道怎麼掰了。回到家還
是
: 在想為什麼要一直堆疊,可是谷歌的結果也是沒答案,各位鄉民知道嗎?
: https://i.imgur.com/EGNtsRB.jpg
認真回覆你的問題,不要說Ptt沒有溫暖
1. 以銅製程CMOS Logic製程而言,channel size從80nm>55>40>28>20>1x FinFet,
Device尺寸一直微縮,對應就是你BEOL金屬 routing線就跟著約細密,
然後DUV黃光曝光有極限,當難以Routing時,就會把走線往上延伸一層,
有點類似BEOL 的Metal +Via當contact用。
BTW, 最容易理解的範例就是去找COMS製程內通用的6T SRAM layout 來看,就會看到是其
需要3層Metal來完成,因為Bit
size太細,M1只是將contact 往上拉騰出空間,M2和M3分別完成BL和WL的走線。
2.部分High voltage製程,為了避免金屬走線電壓差過大,所以必須讓開Metal
space,當空間不足以routing時,就必須往上畫。
3.部分RF元件,必須使用電感,因此會有超厚metal的使用。
4.製程需要電容,其中MOM,就是需要METAL和METAL夾的寄生電容。
總結,
一般成熟的CMOS Logic製程都會提供多種metal option給客戶用,不乏有1P10M的選項,
但是越多層Metal,成本越高,cycle time越長,所以能少一層是一層
--
: 如題,面試某科技廠時被問CMP和BEOL這些方向,結果人資問BEOL為什麼要蓋那麼高(
示
: 意圖)我說訊號傳遞,人資說能不能再清楚一點,然後我也不知道怎麼掰了。回到家還
是
: 在想為什麼要一直堆疊,可是谷歌的結果也是沒答案,各位鄉民知道嗎?
: https://i.imgur.com/EGNtsRB.jpg

認真回覆你的問題,不要說Ptt沒有溫暖
1. 以銅製程CMOS Logic製程而言,channel size從80nm>55>40>28>20>1x FinFet,
Device尺寸一直微縮,對應就是你BEOL金屬 routing線就跟著約細密,
然後DUV黃光曝光有極限,當難以Routing時,就會把走線往上延伸一層,
有點類似BEOL 的Metal +Via當contact用。
BTW, 最容易理解的範例就是去找COMS製程內通用的6T SRAM layout 來看,就會看到是其
需要3層Metal來完成,因為Bit
size太細,M1只是將contact 往上拉騰出空間,M2和M3分別完成BL和WL的走線。
2.部分High voltage製程,為了避免金屬走線電壓差過大,所以必須讓開Metal
space,當空間不足以routing時,就必須往上畫。
3.部分RF元件,必須使用電感,因此會有超厚metal的使用。
4.製程需要電容,其中MOM,就是需要METAL和METAL夾的寄生電容。
總結,
一般成熟的CMOS Logic製程都會提供多種metal option給客戶用,不乏有1P10M的選項,
但是越多層Metal,成本越高,cycle time越長,所以能少一層是一層
--
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